Modeling, design and testing of the electrostatic shuffle motor
- 1 October 1998
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 70 (1-2), 171-178
- https://doi.org/10.1016/s0924-4247(98)00129-0
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Controlled stepwise motion in polysilicon microstructuresJournal of Microelectromechanical Systems, 1993