Nanostructured silicon for studying fundamental aspects of nanomechanics
- 22 August 2002
- journal article
- Published by IOP Publishing in Journal of Physics: Condensed Matter
- Vol. 14 (34), R905-R945
- https://doi.org/10.1088/0953-8984/14/34/202
Abstract
No abstract availableThis publication has 69 references indexed in Scilit:
- Nanomechanical Resonator Shuttling Single Electrons at Radio FrequenciesPhysical Review Letters, 2001
- Single-crystalline silicon lift-off films for metal–oxide–semiconductor devices on arbitrary substratesApplied Physics Letters, 2000
- Nanomechanical resonators operating as charge detectors in the nonlinear regimeEurophysics Letters, 2000
- Auf dem Weg zur „Quanten‐Mechanik”︁: Nanomechanische Resonatoren dienen als schnelle Schalter und FrequenzgeberPhysikalische Blätter, 2000
- Suspending highly doped silicon-on-insulator wires for applications in nanomechanicsNanotechnology, 1999
- Measurement of mechanical resonance and losses in nanometer scale silicon wiresApplied Physics Letters, 1999
- Josephson junctions defined by a nanoploughApplied Physics Letters, 1998
- Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystalsApplied Physics Letters, 1996
- Micro resonant force gaugesSensors and Actuators A: Physical, 1992
- Ultra-low-noise cryogenic high-electron-mobility transistorsIEEE Transactions on Electron Devices, 1988