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Thermal Oxidation and Electrolytic Etching of Silicon Carbide
Home
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Thermal Oxidation and Electrolytic Etching of Silicon Carbide
Thermal Oxidation and Electrolytic Etching of Silicon Carbide
WM
W. von Münch
W. von Münch
IP
I. Pfaffeneder
I. Pfaffeneder
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1 May 1975
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 122
(5)
,
642-643
https://doi.org/10.1149/1.2134280
Abstract
No abstract available
Cited by 69 articles