Batch derivation of piezoresistive coefficient tensor by matrix algebra
- 18 November 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (3), 332-334
- https://doi.org/10.1088/0960-1317/14/3/003
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance EffectsJournal of Applied Physics, 1961
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954