A semiempirical formula for the energy dependence of the sputtering yield
- 1 January 1981
- journal article
- research article
- Published by Informa UK Limited in Radiation Effects
- Vol. 57 (1), 15-21
- https://doi.org/10.1080/01422448008218676
Abstract
We have derived a simple empirical formula for sputtering yields of monatomic metals and semiconductors, taking the threshold effect for knock-on of atoms into account in the Sigmund theory. It is found that this semi-empirical formula fits to the energy dependence of the sputtering yields over a wide range of ion-target combinations. The best fit values of the parameters for the formula are given as a function of the ratio of the mass of target atoms and the mass of incident ions.Keywords
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