Transient dynamics of a MEMS variable capacitor driven with a Dickson charge pump
- 31 March 2006
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 128 (1), 89-97
- https://doi.org/10.1016/j.sna.2006.01.032
Abstract
No abstract availableKeywords
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