Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
Nanolithography with an atomic force microscope
Home
Publications
Nanolithography with an atomic force microscope
Nanolithography with an atomic force microscope
MW
M. Wendel
M. Wendel
BI
B. Irmer
B. Irmer
JC
J. Cortes
J. Cortes
RK
R. Kaiser
R. Kaiser
HL
H. Lorenz
H. Lorenz
JK
J.P. Kotthaus
J.P. Kotthaus
A. Lorke
A. Lorke
EW
E. Williams
E. Williams
Publisher Website
Google Scholar
Cite
Download
Share
Download
1 October 1996
journal article
Published by
Elsevier BV
in
Superlattices and Microstructures
Vol. 20
(3)
,
349-356
https://doi.org/10.1006/spmi.1996.0088
Abstract
No abstract available
Keywords
FABRICATION
ARRAYS
TIP
HOLE
REGIME
FORCE MICROSCOPE
LITHOGRAPHIC
ATOMIC FORCE
Cited by 23 articles