Piezoelectric ultrasonic transducer based on flexible AlN
- 1 June 2014
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 121, 59-63
- https://doi.org/10.1016/j.mee.2014.03.034
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Aluminum Nitride piezo-MEMS on polyimide flexible substratesMicroelectronic Engineering, 2011
- Fabrication of MEMS ZnO dome-shaped-diaphragm transducers for high-frequency ultrasonic imagingJournal of Micromechanics and Microengineering, 2005
- Capacitive Micromachined Ultrasonic Transducers: Theory and TechnologyJournal of Aerospace Engineering, 2003