Mass effects on regrowth rates and activation energies of solid-phase epitaxy induced by ion beams in silicon
- 15 June 1999
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 59 (23), 15214-15224
- https://doi.org/10.1103/physrevb.59.15214
Abstract
The effect of ion mass on ion-beam-induced epitaxial crystallization of silicon has been examined for five types of ion (C, Si, Ge, Ag, Au) at energies of 1.5, 3.0, and 5.6 MeV. Regrowth rates have been normalized to the number of displacements or nuclear energy deposition at the interface to evaluate the contribution of defect generation to crystal growth. The normalized regrowth rate increased by a factor of 4 with decreasing ion mass from Au to C, showing a similar behavior to dose rate dependences previously reported at lower ion energies. However, the dose rate dependence for 3.0 MeV Au and Ag deviated from this mass dependence curve at low dose rates, indicating that significant cascade density effects (instantaneous dose rate effects) coexist with average dose rate effects. This implies that the crystal growth rate is affected by defect interactions within individual cascades as well as by defect interactions between different cascades. Activation energies measured for four types of ion at 3.0 MeV are also mass dependent and varied from 0.18 to 0.40 eV. These results indicate that ion-beam-induced epitaxial crystallization cannot be characterized by a single activation energy. Our data have been compared with a number of models for ion-beam-induced crystallization and found to be inconsistent with a process controlled by a single defect type. We suggest that several rate-limiting defect processes may be involved and the dominance of a single defect depends on the ion mass (cascade density), average dose rate, and temperature regime.Keywords
This publication has 42 references indexed in Scilit:
- Ion-beam-induced epitaxial crystallization and amorphization in siliconMaterials Science Reports, 1990
- Divacancy control of the balance between ion-beam-induced epitaxial cyrstallization and amorphization in siliconJournal of Materials Research, 1988
- Ion-beam-assisted growth of doped Si layersJournal of Materials Research, 1988
- Orientation and doping effects in ion beam annealing of α-siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Ion-beam induced crystallization and amorphization at a crystalline/amorphous interface in siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Ion-beam-induced crystallization and amorphization of siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Dominant Influence of Beam-Induced Interface Rearrangement on Solid-Phase Epitaxial Crystallization of Amorphous SiliconPhysical Review Letters, 1985
- Ion-beam-induced epitaxial regrowth of amorphous layers in silicon on sapphirePhysical Review B, 1984
- Novel low-temperature recrystallization of amorphous silicon by high-energy ion beamApplied Physics Letters, 1982
- Ion-beam induced epitaxy of siliconPhysics Letters A, 1979