Single-crystalline 4H-SiC micro cantilevers with a high quality factor
- 18 April 2013
- journal article
- research article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 197, 122-125
- https://doi.org/10.1016/j.sna.2013.04.014
Abstract
No abstract availableKeywords
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