Angle‐resolved Mueller polarimeter using a microscope objective
- 4 April 2008
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 205 (4), 743-747
- https://doi.org/10.1002/pssa.200777806
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Application of Mueller polarimetry in conical diffraction for critical dimension measurements in microelectronicsApplied Optics, 2006
- Metrological applications of Mueller polarimetry in conical diffraction for overlay characterization in microelectronicsThe European Physical Journal Applied Physics, 2005
- Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” [Thin Solid Films 455–456 (2004) 828–836]Thin Solid Films, 2004
- Optimized Mueller polarimeter with liquid crystalsOptics Letters, 2003
- Thin-Film Optical FiltersPublished by Informa UK Limited ,2001
- General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometersApplied Optics, 1999
- Ellipsometric scatterometry for the metrology of sub-01-μm-linewidth structuresApplied Optics, 1998
- Interpretation of Mueller matrices based on polar decompositionJournal of the Optical Society of America A, 1996
- Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratingsJournal of the Optical Society of America A, 1996
- Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratingsJournal of the Optical Society of America A, 1995