A MEMS based electrochemical seismometer with a novel integrated sensing unit
- 1 January 2016
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Abstract
This study proposed a new process to fabricate the sensing unit of an electrochemical seismometer using only one silicon wafer. Based on this new fabrication process, the effective area of electrodes and the fabrication efficiency were significantly improved. In this study, the SU-8 negative photoresist was utilized as both the substrate (exposed SU-8) and the sacrificial layer (unexposed SU-8) on top of which the suspended platinum electrodes were fabricated using the positive-photoresist lift-off technology. The performances of the proposed devices were characterized experimentally where compared to the commercially available counterpart CME6011, significant improvements in 3 dB working bandwidth (0.11 Hz ~21.50 Hz vs. 0.47 Hz ~18.24 Hz) and device sensitivity (1592V/(m/s) vs. 820 V/(m/s)) were located.Keywords
This publication has 7 references indexed in Scilit:
- A MEMS Based Electrochemical Vibration Sensor for Seismic Motion MonitoringJournal of Microelectromechanical Systems, 2013
- A micro electrochemical seismic sensor based on MEMS technologiesSensors and Actuators A: Physical, 2013
- A micro seismometer based on molecular electronic transducer technology for planetary explorationApplied Physics Letters, 2013
- Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMSKey Engineering Materials, 2012
- 3D numerical simulation of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometerSensors and Actuators B: Chemical, 2010
- Dynamic Characteristic of an Electrochemical Cell with Gauze Electrodes in Convective Diffusion ConditionsRussian Journal of Electrochemistry, 2004
- The Kinetics of the Iodine Redox Process at Platinum ElectrodesJournal of the Electrochemical Society, 1961