PZN-PT Single-Crystal Thin Film Monomorph Actuator

Abstract

We report on the use of single-crystal lead zinc niobate-lead titanate films in monomorph actuators. The article responds to the growing interest in solid-solution (1 m x )Pb(Zn 1/3 Nb 2/3 )O 3 - x PbTiO 3 relaxor ferroelectrics based on their large piezoelectric coefficients and their integration into microelectromechanical system. Freestanding films are fabricated by slicing a 7 w m-thick layer off the crystal bulk and assembled into a flexural actuator, thus circumventing polycrystalline deposition techniques. One-micron deflections are observed at 100 V for ∼1 mm-long films. The article discusses the non-uniform electric field distribution profile established in the films and its role in the actuation process.