Enhanced sputtering from nanoparticles and thin films: Size effects
- 28 March 2008
- journal article
- Published by IOP Publishing in Europhysics Letters
- Vol. 82 (2), 26002
- https://doi.org/10.1209/0295-5075/82/26002
Abstract
Sputtering of gold nanoparticles and nanometer-thin films under 25 keV gallium-ion bombardment is shown, using molecular-dynamics simulations, to be significantly enhanced compared to bulk. The highest yield, about three times that of bulk gold, occurs for particles of about 8 nm in diameter. For thin films, the maximal yield is obtained for roughly 3 nm thick films. A model based on the work of Sigmund is presented to explain the size-dependence.This publication has 13 references indexed in Scilit:
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