Static and Dynamic Postannealing Strategies for Roll-to-Roll Fabrication of DC Magnetron Sputtered Bismuth Telluride Thin Films onto Polymer Webs
- 22 February 2021
- journal article
- research article
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 13 (8), 10149-10160
- https://doi.org/10.1021/acsami.1c00721
Abstract
High-throughput roll-to-roll processes are desirable to scale up the manufacture of flexible thermoelectric generators. While vacuum deposition onto a heated dynamic substrate presents a considerable engineering challenge, viable postdeposition in-line annealing processes are considered as an alternative to improve the functional performance of as-deposited films. The effect of infrared and electron-beam irradiations of 1 μm thick bismuth telluride thin films, produced by a vacuum roll-to-roll process for use as thermoelectric materials, was examined. A static vacuum oven and pulsed high-energy electron beam were also studied as control groups. All annealing strategies increased the crystallite size and decreased the Te content. Only the static vacuum oven treatment was shown to significantly improve the film’s crystallinity. After 1 h annealing, the power factor improved by 400% (from 2.8 to 14 × 10–4 W/mK2), which, to the knowledge of the authors, is the highest reported thermoelectric performance of postannealed or hot-deposited Bi–Te films. As for in-line annealing, infrared and electron-beam post treatments improved the power factor by 146% (from 2.8 to 6.9 × 10–4 W/mK2) and 64% (from 2.8 to 4.6 × 10–4 W/mK2), respectively.Funding Information
- Engineering and Physical Sciences Research Council (EP/M015173/1)
- China Scholarship Council
This publication has 69 references indexed in Scilit:
- Thermoelectric Characteristics of n-Type Bi2Te3 and p-Type Sb2Te3 Thin Films Prepared by Co-Evaporation and Annealing for Thermopile Sensor ApplicationsMATERIALS TRANSACTIONS, 2013
- MBE growth optimization of topological insulator Bi2Te3 filmsJournal of Crystal Growth, 2011
- Recrystallization induced in situ nanostructures in bulk bismuth antimony tellurides: a simple top down route and improved thermoelectric propertiesEnergy & Environmental Science, 2010
- Pulsed laser deposition of bismuth telluride thin film and annealing effectsThe European Physical Journal Applied Physics, 2009
- Effect of deposition temperature on the structural and thermoelectric properties of bismuth telluride thin films grown by co-sputteringThin Solid Films, 2006
- Composition-dependent layered structure and transport properties in BiTe thin filmsPhysical Review B, 2001
- Growth of p- and n-type bismuth telluride thin films by co-evaporationJournal of Crystal Growth, 2001
- Preparation and characterization of MOCVD bismuth telluride thin filmsJournal of Crystal Growth, 1998
- Electrical conductivity and thermoelectric power of amorphous Sb2Te3 thin films and amorphous-crystalline transitionJournal of Materials Science, 1987
- Scherrer after sixty years: A survey and some new results in the determination of crystallite sizeJournal of Applied Crystallography, 1978