Optimization of Pt-C Deposits by Cryo-FIBID: Substantial Growth Rate Increase and Quasi-Metallic Behaviour
Open Access
- 24 September 2020
- journal article
- research article
- Published by MDPI AG in Nanomaterials
- Vol. 10 (10), 1906
- https://doi.org/10.3390/nano10101906
Abstract
The Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is based on obtaining a condensed layer of precursor molecules by cooling the substrate below the condensation temperature of the gaseous precursor material. This condensed layer is irradiated with ions according to a desired pattern and, subsequently, the substrate is heated above the precursor condensation temperature, revealing the deposits with the shape of the exposed pattern. In this contribution, the fast growth of Pt-C deposits by Cryo-FIBID is demonstrated. Here, we optimize various parameters of the process in order to obtain deposits with the lowest-possible electrical resistivity. Optimized ~30 nm-thick Pt-C deposits are obtained using ion irradiation area dose of 120 μC/cm2 at 30 kV. This finding represents a substantial increment in the growth rate when it is compared with deposits of the same thickness fabricated by standard FIBID at room temperature (40 times enhancement). The value of the electrical resistivity in optimized deposits (~4 × 104 µΩ cm) is suitable to perform electrical contacts to certain materials. As a proof of concept of the potential applications of this technology, a 100 µm × 100 µm pattern is carried out in only 43 s of ion exposure (area dose of 23 μC/cm2), to be compared with 2.5 h if grown by standard FIBID at room temperature. The ion trajectories and the deposit composition have been simulated using a binary-collision-approximation Monte Carlo code, providing a solid basis for the understanding of the experimental results.Funding Information
- National Research Fund (FNR), Luxembourg (C17/MS/11682850/ULOWBEAM)
This publication has 23 references indexed in Scilit:
- High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced DepositionNanomaterials, 2019
- Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic ConditionsMicromachines, 2019
- Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiationScientific Reports, 2019
- Long-range vortex transfer in superconducting nanowiresScientific Reports, 2019
- Perspective: New process technologies required for future devices and scalingAPL Materials, 2018
- Large volume serial section tomography by Xe Plasma FIB dual beam microscopyUltramicroscopy, 2016
- Tailoring chiro-optical effects by helical nanowire arrangementNanoscale, 2015
- Antiferromagnetism atin the layered hexagonal ruthenatePhysical Review B, 2015
- Metal-insulator transition in Pt-C nanowires grown by focused-ion-beam-induced depositionPhysical Review B, 2009
- Focused ion beam induced deposition of low-resistivity copper materialJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004