Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers
- 23 February 2021
- journal article
- research article
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 13 (9), 11224-11236
- https://doi.org/10.1021/acsami.1c00694
Abstract
The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful method for the manufacture of high-resolution features. Critical issues remain to be addressed for successful implementation of DSA, such as dewetting and controlled orientation of BCP domains through physicochemical manipulations at the BCP interfaces, and the spatial positioning and registration of the BCP features. Here, we introduce novel top-coat (TC) materials designed to undergo cross-linking reactions triggered by thermal or photoactivation processes. The cross-linked TC layer with adjusted composition induces a mechanical confinement of the BCP layer, suppressing its dewetting while promoting perpendicular orientation of BCP domains. The selection of areas of interest with perpendicular features is performed directly on the patternable TC layer via a lithography step and leverages attractive integration pathways for the generation of locally controlled BCP patterns and nanostructured BCP multilayers.Funding Information
- Industrial Chair Arkema/CNRS-ENSAM-Cnam
- LabEx Minos (ANR-10-LABX-55-01)
- industrial chair ?HOMERIC? (ANR-13-CHIN-0002-01)
- BPI France (REX-7 project)
- Equipex ELORPrintTec (ANR-10-EQPX-28-01)
- R?gion Rh?ne-Alpes (REX-7 project)
- Initiative d?Excellence IdEx (ANR-10-IDEX-003-02)
- RENATECH (Rex-7 project)
This publication has 69 references indexed in Scilit:
- Polarity-Switching Top Coats Enable Orientation of Sub–10-nm Block Copolymer DomainsScience, 2012
- Inhibition of dewetting of thin polymer filmsProgress in Materials Science, 2012
- Surface-Directed Dewetting of a Block Copolymer for Fabricating Highly Uniform Nanostructured Microdroplets and Concentric NanoringsACS Nano, 2011
- Graphoepitaxial Assembly of Symmetric Block Copolymers on Weakly Preferential SubstratesAdvanced Materials, 2010
- Hierarchical Ordering of Block Copolymer Nanostructures by Solvent Annealing Combined with Controlled DewettingAdvanced Materials, 2008
- Directing the self-assembly of block copolymersProgress in Polymer Science, 2007
- Graphoepitaxy of Spherical Domain Block Copolymer FilmsAdvanced Materials, 2001
- Dewetting at the interface between two immiscible polymersJournal of Physics: Condensed Matter, 1997
- Controlling Polymer-Surface Interactions with Random Copolymer BrushesScience, 1997
- Block Copolymer Thermodynamics: Theory and ExperimentAnnual Review of Physical Chemistry, 1990