Microfabrication of NdFeAs(O,F) thin films and evaluation of the transport properties
- 1 July 2020
- journal article
- research article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 33 (7), 074001
- https://doi.org/10.1088/1361-6668/ab8619
Abstract
Submicron sized strip lines of NdFeAs(O,F) were fabricated and the transport properties were studied. By using laser lithography and dry etching, strip lines with a width as low as 0.84 mu m were fabricated. The superconducting critical temperature was not seriously affected by the fabrication process, but a significant decrease of the critical current density (J(c)) was observed for strip lines narrower than 2 mu m when the sample was etched in Ar plasma. By employing a plasma free method on the other hand, the deterioration of J(c) was largely prevented, and the yield of obtaining strip lines with a J(c) higher than 5 MA cm(-2) rose considerably.Funding Information
- Core Research for Evolutional Science and Technology (JPMJCR18J4)
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