Room-temperature ferromagnetism in C+-implanted AlN films

Abstract
Diluted magnetic semiconductors (DMSs) have numerous potential applications, particularly in spintronics. Therefore, the search for advanced DMSs has been a critical task for a long time. In this work, room-temperature ferromagnetism is observed in the C + -implanted AlN films with C + doses of 5 × 10 16 ( AlN : C 5 × 10 16 ) and 2 × 10 17 cm 2 ( AlN : C 2 × 10 17 ). AlN : C 2 × 10 17 exhibits a saturation magnetization of ∼0.104 emu/g, nearly 1.5 times that of AlN : C 5 × 10 16 . X-ray diffraction and X-ray photoelectron spectroscopy (XPS) measurements reveal that the implanted C + ions occupy the interstitial lattice sites and substitute at the sites of Al atoms. XPS and Doppler broadening of positron annihilation radiation measurements demonstrate the existence of the Al-vacancy related defects in the C + -implanted AlN films. First-principles calculations indicate that the ferromagnetism in AlN : C 5 × 10 16 and AlN : C 2 × 10 17 is mainly originated from defect complexes involving interstitial C atoms and Al vacancies, which have the lowest formation energy among AlN:C defects containing C atoms and Al vacancies. This work provides a feasible route to develop advanced DMSs.
Funding Information
  • National R&D Program of China (2019YFA0210000)
  • National Natural Science Foundation of China (11775215)
  • National Natural Science Foundation of China (11875248)
  • National Natural Science Foundation of China (11975225)