Temperature-insensitive silicon resonant pressure sensor by thermal stress control
- 17 February 2021
- journal article
- research article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 322, 112612
- https://doi.org/10.1016/j.sna.2021.112612
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China
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