Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematicsXYstage
- 9 May 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (6), 1154-1161
- https://doi.org/10.1088/0960-1317/17/6/008
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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