Rhombic-shaped thermal actuator array for evenly-distributed very large displacement
- 1 January 2007
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
Abstract
This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 mum. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.Keywords
This publication has 14 references indexed in Scilit:
- Muscling in on Optical GratingsScience, 2006
- Polymeric, electrically tunable diffraction grating based on artificial musclesOptics Letters, 2006
- Controlling Strong Electromagnetic Fields at Subwavelength ScalesPhysical Review Letters, 2006
- Deformable MEMS grating for wide tunability and high operating speedJournal of Optics A: Pure and Applied Optics, 2006
- Analog Piezoelectric-Driven Tunable Gratings With Nanometer ResolutionJournal of Microelectromechanical Systems, 2004
- Electrothermal properties and modeling of polysilicon microthermal actuatorsJournal of Microelectromechanical Systems, 2003
- Advanced fiber optical switches using deep RIE (DRIE) fabricationSensors and Actuators A: Physical, 2003
- Micro-electro-mechanical variable blaze gratingsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Analytical modeling and optimization for a laterally-driven polysilicon thermal actuatorMicrosystem Technologies, 1999
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989