Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication
- 1 October 2016
- journal article
- Published by Elsevier BV in Precision Engineering
- Vol. 46, 135-146
- https://doi.org/10.1016/j.precisioneng.2016.04.009
Abstract
No abstract availableFunding Information
- National Science Foundation (CMMI-0749028, 0800863)
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