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Published: 28 February 2021
Fuzzy Sets and Systems, Volume 406, pp 93-106; doi:10.1016/j.fss.2020.05.015

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Published: 28 February 2021
Fuzzy Sets and Systems, Volume 406, pp 107-118; doi:10.1016/j.fss.2020.06.007

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Corrigendum
Hoi Wing Leung, Eunice Yuen Ting Lau, Carmen Oi Ning Leung, Martina Mang Leng Lei, Etienne Ho Kit Mok, Victor Wan San Ma, William Chi Shing Cho, Irene Oi Lin Ng, Jing Ping Yun, Shao Hang Cai, et al.
Published: 28 February 2021
Cancer Letters, Volume 499; doi:10.1016/j.canlet.2020.06.007

, Lingling Xing, Feng Yang, Huawei Li, Minghui Chen, Shenglong Zhu, Fuhui Wang
Journal of Materials Science & Technology, Volume 65, pp 7-17; doi:10.1016/j.jmst.2020.04.067

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Junwei Chang, , , Xinlei Liang, Gang Wang, Zuyao Yi, Na Li
Journal of Materials Science & Technology, Volume 65, pp 137-150; doi:10.1016/j.jmst.2020.03.081

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Bingnan Qian, Jinyong Zhang, Yangyang Fu, , Yuan Wu, Jun Cheng, Philippe Vermaut, Frédéric Prima
Journal of Materials Science & Technology, Volume 65, pp 228-237; doi:10.1016/j.jmst.2020.04.078

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Cheng Gu, Yan Lu,
Journal of Materials Science & Technology, Volume 65, pp 99-107; doi:10.1016/j.jmst.2020.03.088

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Guangrong Li, Chunhua Tang,
Journal of Materials Science & Technology, Volume 65, pp 154-163; doi:10.1016/j.jmst.2020.04.076

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Xiangang Lin, Xiaojuan Hou, Lixia Cui, Shiqiang Zhao, Hong Bi, ,
Journal of Materials Science & Technology, Volume 65, pp 164-170; doi:10.1016/j.jmst.2020.03.086

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Zhongdi Yu, , Jinlong Wang, Fengjie Li, Shenglong Zhu, Fuhui Wang
Journal of Materials Science & Technology, Volume 65, pp 126-136; doi:10.1016/j.jmst.2020.04.079

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Erratum
Hong Tian, Yanliang Kang, Xiaoda Song, Yi Xu, Hongmei Chen, Xingqun Gong, Wanli Zhang, Yunyan Xu, Xuefei Xia, , et al.
Published: 28 February 2021
Cancer Letters, Volume 499; doi:10.1016/j.canlet.2020.05.016

Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106530

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Xiayang Yu, , Tao Cui, Trevor Pickett, Pei Xin
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106571

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Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106549

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Mehmet Ali Sarıdaş, , Eser Çeliktopuz, Yeşim Şahiner, Sevgi Paydaş Kargı
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106568

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, , Qazi Muneeb Ahmad Shah, Khalid Z. Masoodi, Baseerat Afroza, Saqib Parvaze
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106572

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Yufeng Wang, Shaozhong Kang, Fusheng Li,
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106566

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, Xiuzhao Yin, Ruochi Hu, Hailing Ma,
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106513

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, Jianjun Yu, Chuan Zhang, Guoqing Wang, Song Huang, Jiamin Ma
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106581

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Lichen Chou, Jie Dai, Xiaoyan Qian, Aliakbar Karimipour,
Published: 28 February 2021
Agricultural Water Management, Volume 245, pp 106583-106583; doi:10.1016/j.agwat.2020.106583

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, Muhammad Jehanzeb Masud Cheema, Saddam Hussain, Muhammad Kaleem Ullah, Muhammad Mazhar Iqbal
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106576

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Shih-Chieh Hsu, Jhen-Yong Hong, Cheng-Lung Chen, , Jia-Han Zhen, Wen-Pin Hsieh, Yang-Yuan Chen, Tung-Han Chuang
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148264

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, Yu Fan, Peng-Fei Liu
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148245

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Miroslav Michlíček, Lucie Blahová, Eva Dvořáková, David Nečas,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.147979

Abstract:
Understanding the role of substrate geometry is vital for a successful optimization of low-pressure plasma polymerization on non-planar substrates used in bioapplications, such as porous materials or well plates. We investigated the altered transport of film-forming species and properties of the coatings for a cyclopropylamine and argon discharge using a combined analysis of the plasma polymer deposition on flat Si pieces, culture wells, microtrenches, a macrocavity, porous hydroxyapatite scaffolds and electrospun polycaprolactone nanofibrous mats. The aspect ratio of the well structures impacted mainly the deposition rate, whereas the film chemistry was affected only moderately. A large deposition penetration depth into the porous media indicated a relatively low sticking probability of film-forming species. A detailed analysis of microtrench step coverage and macrocavity deposition disproved the model of film-forming species with a single overall sticking probability. At least two populations with two different sticking probabilities were required to fit the experimental data. A majority of the film-forming species (76%) has a large sticking probability of 0.20±0.01, while still a significant part (24%) has a relatively small sticking probability of 0.0015±0.0002. The presented methodology is widely applicable for understanding the details of plasma-surface interaction and successful applications of plasma polymerization onto complex substrates.
Ming-Yang Liu, Long Gong, Wen-Zhong Li, Meng-Long Zhang, , Chao Cao
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148268

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Majid Jafari, , Reza Talandashti, Farahnoosh Doustdar, Mohammad Reza Vakili, Afsaneh Lavasanifar
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148274

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Iuliia Melchakova, Kristina M. Nikolaeva, Evgenia A. Kovaleva, Felix N. Tomilin, Sergey G. Ovchinnikov, Olga N. Tchaikovskaya, , Alexander A. Kuzubov
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148223

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Na Hu, Jing Du, , Wen-Jing Cui, Bo-Rong Yu, ,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148306

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G. Mohan Kumar, H.D. Cho, , D.J. Lee, H.C. Jeon, Pundalik D. Walke, D.Y. Kim, T.W. Kang
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148297

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Sijia Fu, Xin Liu, Jingrun Ran, , Shi-Zhang Qiao
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148293

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Yanmiao Yu, , Guokai Liu, , Peiwen Chen, Zhuangzhuang Chang
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148239

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Chenxin Jin, Qiang Lai, Jianglei Dan, Guojun Xu, , Xiaomin Li, Fugen Sun, Haibin Huang, Lang Zhou, Li Wang
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148326

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Yushan Wu, Hongtao Wang, Shuai Guo, ,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148303

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Junjie Wang, , Xingxing Yu, Xiumei Zhuang, Qi Wang, Ningjing Jiang, Jieyu Hu
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148324

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, Moliang Zou, Jianfei Long, Bing Li, Shuqu Zhang, , Dan Wang, Pei Mao, Shenglian Luo, Xubiao Luo
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148311

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M. Khalifeh, , M.M. Golshan
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148323

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, Stefan De Gendt, Silvia Armini
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148307

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, Tom Blomberg, Suvi Haukka, Shaun Cembella, Michael E. Givens, Marko Tuominen, Rajesh Odedra, Wes Graff,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148309

Abstract:
In this work, thermal based gas-phase etching of titanium nitride (TiN) is demonstrated using thionyl chloride (SOCl2) as a novel etchant. A single etchant is utilised in a pulsed fashion to etch TiN. This type of etching technique may also be considered as a chemical gas-phase or dry etching. The removed TiN amount was measured by various techniques like spectroscopic ellipsometry (SE), weighing balance and in some cases X-ray reflectometry (XRR). Additionally, the post-etch surfaces were analysed with X-ray photoelectron spectroscopy (XPS) and bright field transmission electron microscopy (BF-TEM). The surface roughness and morphology of before and after etching TiN films were measured using atomic force microscopy (AFM). The etch per cycle (EPC) was calculated and is plotted as a function of SOCl2 pulse time, purge time after SOCl2 exposure, number of etch cycles and etch temperature (Tetch). An increase in EPC with an increase in SOCl2 pulse time as well as etch temperature was observed. SOCl2 is able to etch TiN starting from 270 °C with an EPC of about 0.03 Å to almost 1.2 Å at 370 °C. Arrhenius plot determined the activation energy (Ea) of about 25 kcal/mol for TiN etching by SOCl2. In addition, the etch selectivity between different substrates such as silicon dioxide (SiO2), silicon nitride (Si3N4) and aluminum oxide (Al2O3) was investigated on blanket as well as 3D structures. Moreover, thermodynamic calculations were performed for various possible etch reactions. Titanium from TiN is proposed to be etched in the form of either titanium trichloride (TiCl3) or titanium tetrachloride (TiCl4). Nitrogen from TiN films may form volatile by-products such as diatomic nitrogen (N2), nitrous oxide (N2O) and nitrogen dioxide (NO2).
Gizem Kaleli-Can, Hatice Ferda Özgüzar,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148360

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Jiufu Chen, Qi Yang, , ,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148340

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Song Yuan, , Penghui Li, Qian Mao, Menggang Lu, Zhuji Jin, Renke Kang, Dongming Guo
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148321

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, Haixing Liu, Qian Wang, Jinghao Huo, Wanyin Ge, Xiaobo Duan,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148351

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Sung-Woo Park, Hyun Jung Shin, Young Jin Heo,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148358

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Wanpeng Li, Hanyu Lu, Huan Wang, Xianhui Ning, Quan Liu, Huankang Zhang, Zhuofu Liu, Jingjing Wang, Weidong Zhao, Yurong Gu, et al.
Published: 28 February 2021
Cancer Letters, Volume 499, pp 301-313; doi:10.1016/j.canlet.2020.11.001

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In Su Jeon, Garam Bae, Moonjeong Jang, Yeoheung Yoon, Seunghun Jang, , Sung Myung, Jongsun Lim, Sun Sook Lee, Ha-Kyun Jung, et al.
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148350

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Kang Lan, Xin Chen, Bradley G. Ridoutt, , Laura Scherer
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106602

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Jinbo Li, , Afeng Zhang, Bing Song, Robert Lee Hill
Published: 28 February 2021
Agriculture, Ecosystems & Environment, Volume 307; doi:10.1016/j.agee.2020.107217

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José De Souza Oliveira Filho, Otavio Augusto Queiroz Dos Santos, Celeste Queiroz Rossi, Yan Vidal De Figueiredo Gomes Diniz, Hugo De Souza Fagundes, Luiz Alberto Da Silva Rodrigues Pinto, Willian Pereira, Marcos Gervasio Pereira
Published: 28 February 2021
Agriculture, Ecosystems & Environment, Volume 307; doi:10.1016/j.agee.2020.107233

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Hyeokjin Kwon, Junil Kim, Kyungmin Ko, Manyalibo J. Matthews, , ,
Published: 28 February 2021
Applied Surface Science, Volume 540; doi:10.1016/j.apsusc.2020.148333

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, Abdeslam Taleb, Youssef Brouziyne
Published: 28 February 2021
Agricultural Water Management, Volume 245; doi:10.1016/j.agwat.2020.106625

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