Control of Chemical Structure and Lithium-ion Conductivity of Amorphous Lithium Phosphate Thin Film Deposited by Pulsed Laser Deposition
- 5 January 2022
- journal article
- research article
- Published by The Chemical Society of Japan in Chemistry Letters
- Vol. 51 (1), 34-37
- https://doi.org/10.1246/cl.210529
Abstract
Effects of target-substrate (TS) distance during pulsed laser deposition process on the chemical structure and lithium-ion conductivity of amorphous lithium phosphate (LPO) thin films are investigated. The shorter TS distance results in lower Li concentration, longer phosphate chain, and higher ionic conductivity. The ionic conductivity of 2.7 × 10−7 S/cm is obtained at 25 °C in the LPO thin film with short TS distance.Keywords
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