Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering
- 16 October 2020
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 60 (SA), SAAB03
- https://doi.org/10.35848/1347-4065/abbb6b
Abstract
A capacitively coupled Ar plasma was produced by the ultra-high frequency power source (450 MHz) and the plasma parameters were studied by Laser Thomson scattering. It was found that a very high density plasma with a low electron temperature was realized; the electron density ne is around (1.1-1.5) x1018 m-3 and the electron temperature Te is around (1.7-2.1) eV. Radial profiles of ne and Te were obtained for different pressures and powers. In all the conditions explored, ne had a single-center-peak profile, while Te profiles were relatively flat along the electrode.Keywords
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