Formation mechanism of bubbles in the crack healing process of fused silica using a CO2 laser

Abstract

The machining-induced cracks and other defects on the surface of fused silica would incur damage when irradiated by intense lasers, which greatly shortens the service life of the fused silica optical components. The high absorption coefficient of fused silica for far-infrared lasers makes it possible to use low-energy CO₂ lasers to melt and heal micro defects on the surface, and hence improve its damage threshold under the service conditions of extremely intense laser. However, the air in the cracks may evolve into bubbles during the laser healing process, but the law of crack morphology evolution and the bubble formation mechanism have not been clearly revealed. In this work, a simulation model of the healing process of fused silica surface cracks under the effect of low-energy CO₂ laser is established. Three bubble formation mechanisms (i.e., the uneven fluidity caused by temperature gradient, the collapse effect caused by inclined cracks, and the internal cracks) are identified based on the simulation results of cracks with various original morphologies and characteristic structural parameters. The simulated fused silica morphology is consistent with the results of the laser healing experiment. This work can provide theoretical guidance for the optimization of optical manufacturing parameters of fused silica, as well as the CO₂ laser healing and polishing strategies.