Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration
Open Access
- 15 November 2020
- journal article
- research article
- Published by Springer Science and Business Media LLC in Microsystems & Nanoengineering
- Vol. 6 (1), 1-11
- https://doi.org/10.1038/s41378-020-00207-0
Abstract
In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator. The working mode stress-frequency theory of a double-ended tuning fork with an enhanced coupling beam is proposed, which is compatible with the simulation and experiment. A unique piezoresistive detection method based on small axially deformed beams with a resonant status is proposed, and other adjacent mode outputs are easily shielded. According to the structure design, high-vacuum wafer-level packaging with different doping in the anodic bonding interface is fabricated to ensure the high quality of the resonator. The pressure sensor chip is fabricated by dry/wet etching, high-temperature silicon bonding, ion implantation, and wafer-level anodic bonding. The results show that the fabricated sensor has a measuring sensitivity of similar to 19Hz/kPa and a nonlinearity of 0.02% full scale in the pressure range of 0-200kPa at a full temperature range of -40 to 80 degrees C. The sensor also shows a good quality factor >25,000, which demonstrates the good vacuum performance. Thus, the feasibility of the design is a commendable solution for high-accuracy pressure measurements.This publication has 24 references indexed in Scilit:
- A Resonant Pressure Microsensor Capable of Self-Temperature CompensationSensors, 2015
- A High-Q Resonant Pressure Microsensor with Through-Glass Electrical Interconnections Based on Wafer-Level MEMS Vacuum PackagingSensors, 2014
- A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric PressureSensors, 2013
- A Review of Silicon Micromachined Resonant Pressure SensorJournal of Mechanical Engineering, 2013
- Stress Isolation Used In MEMS Resonant Pressure Sensor PackageProcedia Engineering, 2011
- Chiral Quest receives US patent for DIOP* ligand familyFocus on Catalysts, 2003
- A high accuracy resonant pressure sensor by fusion bonding and trench etchingSensors and Actuators A: Physical, 1999
- A capacitively excited and detected resonant pressure sensor with temperature compensationSensors and Actuators A: Physical, 1992
- Resonant pressure sensor based on piezoelectric properties of ferroelectric thick filmsSensors and Actuators A: Physical, 1992
- Absolute thermal expansion measurements of single-crystal silicon in the range 300?1300 K with an interferometric dilatometerInternational Journal of Thermophysics, 1988