Influence of Na2SO4-Electrlytic Oxidizing Water on Polishing Surface of Oxygen Free Copper

Abstract

This paper discusses the influence of Na₂SO₄-electrolytic oxidizing water (hereinafter it is referred as EO water) on the polished surface of oxygen free copper. Firstly, the Impact elucidation experiment against the polished surface of oxygen free copper, using Na₂SO₄ EO water and H₂SO₄ solution, and with or without ultrasonic, was carried out. The results showed the etching marks when immersed in Na₂SO₄ EO water are remarkable, compared to the H₂SO₄ solution, and there was almost no difference with or without the ultrasound. Next, the Impact elucidation experiment against the polished surface of oxygen free copper was also conducted after the heat treatment, was carried out. The results showed on the surface of the test piece after the immersion treatment, protrusions are generated when immersed into H₂SO₄ solution, but almost no protrusions are generated when immersed into the N₂SO₄ EO water. Lastly, the cause of protrusions was clarified by the verification experiments. By this study, we received the suggestion that a surface of oxygen free copper with higher accuracy can be obtained.