Wide range of droplet jetting angles by thin-film based surface acoustic waves

Abstract

Nozzleless jetting of droplets with different jetting angles is a crucial requirement for 2D and 3D printing/bioprinting applications, and Rayleigh mode surface acoustic waves (SAWs) could be a potential technique for achieving this purpose. Currently, it is critical to vary the jetting angles of liquid droplets induced by SAWs and control the liquid jet directions. Generally, the direction of the liquid jet induced by SAWs generated from a bulk piezoelectric substrate such as LiNbO3 is along the theoretical Rayleigh angle of ~22o. In this study, we designed and manufactured thin-film SAW devices by depositing ZnO films on different substrates (including silicon and aluminium) to realize a wide range of jetting angles from ~16o to 55o using propagating waves generated from one interdigital transducer (IDT). We then systematically investigated different factors affecting the jetting angles, including liquid properties, applied SAW power and SAW device resonant frequency. Finally, we proposed various methods using thin-film SAW devices together with different transducer designs for realizing a wide range of jetting angles within the 3D domain.