Broadband InSb/Si heterojunction photodetector with graphene transparent electrode

Abstract

Silicon-based Schottky heterojunction photodetectors are promising due to their compatibility with the semiconductor process. However, the applications of these devices are usually limited to wavelengths shorter than 1.1 mu m due to the low absorption of electrode materials at infrared. In this report, silicon-based compound semiconductor heterojunction photodetectors with graphene transparent electrodes are fabricated. Due to the high absorption of InSb at infrared, as well as the good transparency and excellent electrical conductivity of the graphene, the as-prepared photodetectors show a broadband photoresponse with high performance which includes a specific detectivity of 1.9 x<i10(12) cm Hz(1/2) W-1, responsivity of 132 mA W-1, on/off ratio of 1 x<i10(5), rise time of 2 mu s, 3 dB cut-off frequency of 172 kHz, and response wavelengths covering 635 nm, 1.55 mu m and 2.7 mu m. This report proves that graphene as a transparent electrode has a great effect on the performance improvement of silicon-based compound semiconductor heterojunction photodetectors.