Precise Polishing of Silicon Wafer Using Dilute NaCl Electrolytically Reduced Water
Open Access
- 1 January 2006
- journal article
- Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering, Contributed Papers
- Vol. 72 (10), 1247-1252
- https://doi.org/10.2493/jspe.72.1247
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- End Milling of Carbon Steel Using Electrolyzed Reduced WaterTRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C, 2005
- Influence of Dilute NaCl Electrolyzed Water on Character of Al-Mg Alloy Cutting SurfaceJournal of the Japan Society for Precision Engineering, Contributed Papers, 2004