Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes
Open Access
- 5 January 2020
- Vol. 20 (1), 295
- https://doi.org/10.3390/s20010295
Abstract
The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.Keywords
Funding Information
- National Natural Science Foundation of China (11304384, 61575220)
This publication has 21 references indexed in Scilit:
- Optical and Electrical Method Characterizing the Dynamic Behavior of the Fused Silica Cylindrical ResonatorSensors, 2019
- 870 000 $Q$ -Factor Capacitive Lamé Mode Resonator With Gap Closing Electrodes Enabling 4.4 k $\Omega$ Equivalent Resistance at 50 VIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2019
- A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gapsJournal of Micromechanics and Microengineering, 2017
- Piezoelectric Bulk Mode Disk Resonator Post-Processed for Enhanced Quality Factor PerformanceJournal of Microelectromechanical Systems, 2016
- 18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI TechnologyJournal of Microelectromechanical Systems, 2016
- HRG and marine applicationsGyroscopy and Navigation, 2014
- Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband FilteringIEEE Transactions on Microwave Theory and Techniques, 2012
- 5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 millionSensors and Actuators A: Physical, 2009
- Improved accuracy metallic resonator CVGIEEE Aerospace and Electronic Systems Magazine, 2009
- Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS ResonatorsJournal of Microelectromechanical Systems, 2006