Nonlinear Vibration Analysis of an Electrostatically Actuated Microbeam using Differential Transformation Method

Abstract
In this paper, nonlinear vibration of electrostatically actuated microbeam is analyzed using differential transformation method. The high level of accuracy of the analytical solutions of the method was established through comparison of the results of the solutions of exact analytical method, variational approach, homotopy analysis method and energy balance methods. Also, with the aid of the present analytical solution, the time response, velocity variation and the phase plots of the system are presented graphically. It is hope that the method will be widely applied to more nonlinear problems of systems in various fields of study.