Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film
Open Access
- 15 February 2021
- Vol. 14 (4), 924
- https://doi.org/10.3390/ma14040924
Abstract
The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness was about 60 nm after 1600 mA·h SR exposure, whereas there was little change in their elemental composition. The reduction in volume was attributable to photoetching caused by SR, unlike the desorption of hydrogen in the case of exposure of hydrogenated DLC (H-DLC) film to soft X-rays. The ratio of the sp2 hybridization carbon and sp3 hybridization carbon in the hydrogenated Si-DLC films, sp2/(sp2 + sp3) ratio, increased rapidly from ~0.2 to ~0.5 for SR doses of less than 20 mA·h. SR exposure significantly changed the local structure of carbon atoms near the surface of the hydrogenated Si-DLC film. The rate of volume reduction in the irradiated hydrogenated Si-DLC film was 80 times less than that of the H-DLC film. Doping DLC film with Si thus suppresses the volume reduction caused by exposure to soft X-rays.Funding Information
- JSPS KAKENHI (JP17K06799)
This publication has 42 references indexed in Scilit:
- Photochemical modification of DLC films with oxygen functionalities and their chemical structure controlDiamond and Related Materials, 2013
- Effect of the Soft X-rays on Highly Hydrogenated Diamond-Like Carbon FilmsJapanese Journal of Applied Physics, 2011
- Structural Changes in Diamond-Like Carbon Films Fabricated by Ga Focused-Ion-Beam-Assisted Deposition Caused by AnnealingJapanese Journal of Applied Physics, 2010
- Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor DepositionJapanese Journal of Applied Physics, 2007
- Properties of flexible DLC film deposited by amplitude-modulated RF P-CVDTribology International, 2004
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline PolyimideJapanese Journal of Applied Physics, 2004
- Characterization of Hard Diamond-Like Carbon Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene DepositionJapanese Journal of Applied Physics, 2002
- Quantitative Analysis of Hydrogen in Amorphous Films of Hydrogenated Carbon NitrideJapanese Journal of Applied Physics, 2001
- Dehydrogenation of Nitrogen-Containing Carbon Films by High-Energy He2+ IrradiationJapanese Journal of Applied Physics, 2001
- Interpretation of Raman spectra of disordered and amorphous carbonPhysical Review B, 2000