Sub-micronic and nano-dimensional electronics structures

Abstract
If you need full access to the book, please write an email to the Publisher. Your request will be redirected to the author. If s/he is interested, s/he will directly contact you using the email address you have specified to discuss the conditions for obtaining access without the intermediary of the Publisher. The textbook describes the physical-chemical bases of the functioning of submicron and nanoscale electronics structures and the technological principles of their creation using inorganic and organic materials. For students of higher educational establishments of accreditation levels III-IV, studying in the fields of preparation: "Electrical Engineering and Electrotechnology", "Radio Engineering", "Micro- and Nanoelectronics", "Instrumentation", "Physics".