Precision Fabrication of a Large-Area Sinusoidal Surface Using a Fast-Tool-Servo Technique ─Improvement of Local Fabrication Accuracy─
- 1 January 2006
- journal article
- Published by Japan Society of Mechanical Engineers in JSME International Journal Series C
- Vol. 49 (4), 1203-1208
- https://doi.org/10.1299/jsmec.49.1203
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface EncoderCIRP Annals, 2003
- Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoderPrecision Engineering, 2003
- An Angle-Based Position Detection Method for Precision Machines.JSME International Journal Series C, 1999
- Design and testing of a fast tool servo for diamond turningPrecision Engineering, 1985