422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth
Top Cited Papers
Open Access
- 10 February 2021
- journal article
- research article
- Published by Springer Science and Business Media LLC in Nature Communications
- Vol. 12 (1), 1-8
- https://doi.org/10.1038/s41467-021-21205-4
Abstract
High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.This publication has 67 references indexed in Scilit:
- Silicon microring resonatorsLaser & Photonics Reviews, 2011
- Particle sizing by mode splittingNature Photonics, 2010
- Optical frequency comb generation from a monolithic microresonatorNature, 2007
- Rayleigh scattering, mode coupling, and optical loss in silicon microdisksApplied Physics Letters, 2004
- Dynamical thermal behavior and thermal self-stability of microcavitiesOptics Express, 2004
- Ultra-high-Q toroid microcavity on a chipNature, 2003
- An introduction to Pound–Drever–Hall laser frequency stabilizationAmerican Journal of Physics, 2001
- Optical loss property of silica-based single-mode fibersJournal of Lightwave Technology, 1992
- Laser phase and frequency stabilization using an optical resonatorApplied Physics B Laser and Optics, 1983
- Theory of the linewidth of semiconductor lasersIEEE Journal of Quantum Electronics, 1982