Nanolayer Growth on 3-Dimensional Micro-Objects by Pulsed Laser Deposition

Abstract

Pulsed laser deposition on 3-dimensional micro-objects of complex morphology is demonstrated by the paradigmatic growth of cellulose and polymer/Y₃Al₅O₁₂:Ce phosphor composite nanolayers. Congruent materials transfer is a result of multicomponent ablation performed by relatively low fluence (−2) ArF excimer laser pulses (λ = 193 nm). Films grown on optical and engineering components, having a thickness from ~50 nm to more than ~300 nm, are durable, well adherent and maintain the structural and functional properties of the parent solids. The results verify the unique capabilities of deep-ultraviolet pulsed laser deposition of novel functional nanostructures on arbitrary surface morphologies and highlight its potential in future 3-dimensional nanotechnologies.