Theoretical investigation of two-dimensional sub-wavelength structures fabricated by multi-beam surface plasmon interference lithography
- 1 November 2021
- journal article
- research article
- Published by IOP Publishing in Europhysics Letters
- Vol. 136 (3), 34002
- https://doi.org/10.1209/0295-5075/ac2cf9
Abstract
In this study, multi-beam surface plasmon (SP) interference lithography was theoretically proposed and demonstrated to fabricate periodic two-dimensional sub-wavelength structures. The lithography structures were based on an attenuated total reflection prism used to excite the SPs using a 442 nm laser. Circular lattices with periods of 166 and 288 nm were successfully obtained via three- and six-beam SP interference lithography, respectively; these lattices exhibited an identical feature size of 96 nm. Square dot arrays with a 177 nm period and 88.5 nm spot size were obtained by four-beam SP interference lithography. The proposed lithography technology has a simple structure and is economical; further, it may provide an effective method for the fabrication of two-dimensional sub-wavelength structures.Funding Information
- Hong Liu First-Class Disciplines Development Program of Lanzhou University of Technology
- National Natural Science Foundation of China (61865008)
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