A thin-film temperature sensor based on a flexible electrode and substrate
Open Access
- 1 June 2021
- journal article
- research article
- Published by Springer Science and Business Media LLC in Microsystems & Nanoengineering
- Vol. 7 (1), 1-14
- https://doi.org/10.1038/s41378-021-00271-0
Abstract
Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.Keywords
This publication has 35 references indexed in Scilit:
- Erratum: Ultrathin conformal devices for precise and continuous thermal characterization of human skinNature Materials, 2013
- 25th Anniversary Article: The Evolution of Electronic Skin (E‐Skin): A Brief History, Design Considerations, and Recent ProgressAdvanced Materials, 2013
- Ultrathin conformal devices for precise and continuous thermal characterization of human skinNature Materials, 2013
- An ultra-lightweight design for imperceptible plastic electronicsNature, 2013
- Flexible Wireless Temperature Sensors Based on Ni Microparticle‐Filled Binary Polymer CompositesAdvanced Materials, 2012
- Measurement of exhaled breath temperature in science and clinical practiceBreathe, 2012
- Durability under mechanical bending of the indium tin oxide films deposited on polymer substrate by thermionically enhanced sputteringOrganic Electronics, 2010
- Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformationsProceedings of the National Academy of Sciences of the United States of America, 2008
- An integrated flexible temperature and tactile sensing array using PI-copper filmsSensors and Actuators A: Physical, 2008
- ITO properties on anisotropic flexible transparent cellulosic substrates under different stress conditionsMaterials Science and Engineering B, 2005