X-ray Fluorescence Holography Measurement of Oxynitride Thin Film of CaTaO2N

Abstract

Research of oxynitrides is a new trend in developing new functional material. Getting information about the local structure around the cation is crucial because the arrangement of the anions affects the cations and the displacement of cations can be related to their physical properties. To study the effects of mixed anions on the behavior of the cations in oxynitrides, we applied X-ray fluorescence holography on a CaTaO₂N thin film. Atomic images reconstructed from Ta Lα holograms clearly showed the atomic positions around Ta. By comparing the intensities of the Ta and Ca atomic images, we found that the fluctuations of the Ta atoms are larger than the Ca atoms.