Response to “Comment on ‘A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma’” [Phys. Plasmas 28, 064701 (2021)]
- 1 June 2021
- journal article
- letter
- Published by AIP Publishing in Physics of Plasmas
- Vol. 28 (6), 064702
- https://doi.org/10.1063/5.0048524
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Response to “Comment on ‘A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma’” [Phys. Plasmas 28, 064701 (2021)]Physics of Plasmas, 2021
- Comment on “A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma” [Phys. Plasmas 22, 123504 (2015)]Physics of Plasmas, 2021
- A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasmaPhysics of Plasmas, 2015