Microlenses arrays: Fabrication, materials, and applications
- 14 May 2021
- journal article
- review article
- Published by Wiley in Microscopy Research and Technique
- Vol. 84 (11), 2784-2806
- https://doi.org/10.1002/jemt.23818
Abstract
Microlenses have become an indispensable optical element in many optical systems. The advancement of technology has led to a wider variety of microlenses fabrication methods, but these methods suffer from, more or less, some limitations. In this article, we review the manufacturing technology of microlenses from the direct and indirect perspectives. First, we present several fabrication methods and their advantages and disadvantages are discussed. Then, we discuss the commonly used materials for fabricating microlenses and the applications of microlenses in various fields. Finally, we point out the prospects for the future development of microlenses and their fabrication methods.Keywords
Funding Information
- Natural Science Foundation of Shandong Province (ZR2019BF049)
- National Natural Science Foundation of China (61803323)
This publication has 180 references indexed in Scilit:
- Direct fabrication of microlens arrays with high numerical aperture by ink-jetting on nanotextured surfaceApplied Surface Science, 2013
- Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesasJournal of Materials Chemistry C, 2013
- Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in MicroholesAdvanced Materials, 2012
- Dynamically tunable hemispherical electronic eye camera system with adjustable zoom capabilityProceedings of the National Academy of Sciences of the United States of America, 2011
- Photoetching of spherical microlenses on glasses using a femtosecond laserOptics Communications, 2009
- Dielectric liquid microlens with well-shaped electrodeOptics Express, 2009
- The Dry‐Style Antifogging Properties of Mosquito Compound Eyes and Artificial Analogues Prepared by Soft LithographyAdvanced Materials, 2007
- Organic selective-area patterning method for microlens array fabricationMicroelectronic Engineering, 2006
- Scaling laws for pulsed electrohydrodynamic drop formationApplied Physics Letters, 2006
- Monolithic integration technology between microlens arrays and infrared charge coupled devicesOptics & Laser Technology, 2005