An investigation to determine the interface condition between graphene and aluminum oxide
Open Access
- 17 November 2020
- journal article
- research article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 59 (12), 124001
- https://doi.org/10.35848/1347-4065/abc49b
Abstract
The interface condition between the graphene channel and aluminum oxide (Al2O3) gate insulator in a graphene field effect transistor (GFET) has been analyzed. In the pulsed S-parameters measurements, it was found that the direction of the Dirac Voltage shift matched the polarity of the applied voltage stress. The Dirac Voltage shift demonstrated that there were electron traps at the interface, degrading the FET performance such as the cut-off frequency. The hard X-ray photoelectron spectroscopy technique was also employed to analyze the interface. In the obtained C1s spectra, a small peak was found at 284.2 eV, which was considered to be derived from a covalent bond between the graphene and Al2O3. It was concluded that the unexpected bond at the interface formed electron traps whose energy level located near the conduction band minimum and that the Dirac Voltage shifted in accordance with carrier capturing or emitting by the traps.Keywords
Funding Information
- New Energy and Industrial Technology Development Organization
This publication has 22 references indexed in Scilit:
- Scaling of Al2O3 dielectric for graphene field-effect transistorsApplied Physics Letters, 2012
- Micrometer-Scale Ballistic Transport in Encapsulated Graphene at Room TemperatureNano Letters, 2011
- 30-nm InAs PHEMTs With $f_{T} = \hbox{644}\ \hbox{GHz}$ and $f_{\max} = \hbox{681}\ \hbox{GHz}$IEEE Electron Device Letters, 2010
- Graphene transistorsNature Nanotechnology, 2010
- Single-layer graphene on Al2O3/Si substrate: better contrast and higher performance of graphene transistorsNanotechnology, 2009
- Non-destructive compositional depth profile analysis by hard x-ray photoelectron spectroscopyJournal of Physics: Conference Series, 2008
- Recoil effects of photoelectrons in a solidPhysical Review B, 2007
- Electric Field Effect in Atomically Thin Carbon FilmsScience, 2004
- XPS study of metal/polymer interaction: Evaporated aluminum on polyvinyl alcohol polymerSurface and Interface Analysis, 1990
- Characterization of ultra-high-speed pseudomorphic AlGaAs/InGaAs (on GaAs) MODFETsIEEE Transactions on Electron Devices, 1989