Evaluation of Stiffness and Parametric Modelling of XY Flexure Mechanism for Precision Applications

Abstract
In miniaturized scale electro-mechanical framework (MEMS) flexural instruments are generally utilized in light of their preferences, frictionless and wear less movement and high accuracy. Flexures rely upon material versatility for their usefulness. In flexure component, movement is created because of flexibility of the shaft from which it is made. One of the run of the mill favorable circumstances of flexural system is to increase exact twisting and adaptability to acquire movement wanted way. This paper manages outline, examination and displaying of XY flexure instrument which depends on twofold parallelogram flexure (DFM). The XY system exhibited has solid structure and it depends on twofold parallelogram flexure. Limited component model and investigation is completed in ANSYS 15. Static examination is done to discover constrain avoidance attributes of instrument. Parametric examination is utilized to improve outline parameters of flexure shaft. Limited component examination (FEA) result approves investigative outcomes of component.