Growth of the ternary Pb(Mn,Nb)O 3 –Pb(Zr,Ti)O 3 thin film with high piezoelectric coefficient on Si by RF sputtering
- 10 December 2022
- journal article
- research article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 106 (4), 2347-2356
- https://doi.org/10.1111/jace.18918
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (11974250, 62175155, 52172005, 12104310)
- Huazhong University of Science and Technology (P2021‐019)
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