Exploration of Monolayer MoS2 Template-Induced Growth of GaN Thin Films via Plasma-Enhanced Atomic Layer Deposition
- 8 February 2021
- journal article
- research article
- Published by American Chemical Society (ACS) in Crystal Growth & Design
- Vol. 21 (3), 1778-1785
- https://doi.org/10.1021/acs.cgd.0c01650
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (52002021)
- Fundamental Research Funds for the Central Universities (FRF-TP-20-016A2)
- National Key R&D Program of China (2018YFA0703700)
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