High-quality welding of glass by a femtosecond laser assisted with silver nanofilm
- 16 June 2021
- journal article
- research article
- Published by Optica Publishing Group in Applied Optics
- Vol. 60 (18), 5360-5364
- https://doi.org/10.1364/ao.422078
Abstract
Glass products with high joint strength are highly demanded in the field of microelectromechanical system (MEMS). While the quality requirement of MEMS is getting higher and higher, much attention has been paid to further improving the welding strength of the glass. Herein, a femtosecond laser welding method assisted by silver nanofilm for quartz glass is proposed. To optimize the welding results, the influence of the laser power on the location of the heat-affected zone is studied. The effect of coated silver nanofilm at the interface of two glass substrates on femtosecond laser absorptivity is conducted. Also, the welding spot size under different irradiation periods is investigated. In addition, the welding strength with and without the silver nanofilm is measured and compared. It is demonstrated that the welding strength was increased nearly 20% on average by our proposed method compared with direct femtosecond laser welding. In addition, even at the lower laser power than the welding threshold, the welding process could be realized by the proposed method.Funding Information
- National Key Research and Development Program of China (2017YFB1104300)
- National Natural Science Foundation of China (51975595)
- Natural Science Foundation of Hunan Province (2020JJ5738)
- Project of State Key Laboratory of High Performance Complex Manufacturing (ZZYJKT2020-10, ZZYJKT2021-12)
This publication has 27 references indexed in Scilit:
- Microfluidic device fabrication mediated by surface chemical bondingThe Analyst, 2020
- Evaluation of the bond quality of laser-joined sapphire wafers using a fresnoite-glass sealantMicrosystem Technologies, 2015
- Femtosecond laser three-dimensional micro- and nanofabricationApplied Physics Reviews, 2014
- Direct glass-to-metal joining by simultaneous anodic bonding and soldering with activated liquid tin solderJournal of the American Academy of Dermatology, 2014
- Ultrashort pulsed fiber laser welding and sealing of transparent materialsApplied Optics, 2012
- Reinforced direct bonding of optical materials by femtosecond laser weldingApplied Optics, 2012
- Laser micro-welding of silicon and borosilicate glass using nonlinear absorption effect induced by 1558-nm femtosecond fiber laser pulsesPublished by SPIE-Intl Soc Optical Eng ,2007
- A glass microfluidic chip adhesive bonding method at room temperatureJournal of Micromechanics and Microengineering, 2006
- Space-selective laser joining of dissimilar transparent materials using femtosecond laser pulsesApplied Physics Letters, 2006
- Local laser bonding for low temperature budgetSensors and Actuators A: Physical, 2002