Dynamic Aurora PLD with Si and porous Si to prepare ZnFe2O4 Thin films for liquefied petroleum gas sensing

Abstract

Polycrystalline ZnFe₂O₄ thin films were deposited on Si and porous Si (PSi) substrates using Dynamic Aurora pulsed laser deposition (PLD in a magnetic field). The average grain sizes of ZnFe₂O₄/Si and ZnFe₂O₄/PSi were, respectively, 120 and 48 nm. The ZnFe₂O₄/PSi thin film resistance was higher than that of ZnFe₂O₄/Si thin film. For ZnFe₂O₄/Si and ZnFe₂O₄/PSi thin films, the sensor response for liquefied petroleum gas was measured as a function of time and temperature. The sensor response of ZnFe₂O₄/PSi thin film measured at 375 °C is higher than that of ZnFe₂O₄/Si thin film. Results showed a steep initial rise in the temperature dependence of ZnFe₂O₄ thin films prepared using PLD. The dependence is steeper than that reported for ZnFe₂O₄ powder or thick and thin films prepared using chemical processing.